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At SEMICON West 2026, Booth #668, Modutek will highlight wet process equipment, SmartFAB AI, chemical delivery systems, and abatement solutions
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Fabs already generate the data they need. The opportunity is to turn it into intelligence that improves reliability, chemical efficiency and environmental performance.”— Vineet Shrivastava, CEO, Modutek Corporation
SAN JOSE, CA, UNITED STATES, October 2, 2026 /EINPresswire.com/ — Modutek Corporation, a U.S.-headquartered manufacturer of semiconductor wet process equipment and fab infrastructure systems, today announced its participation at SEMICON West 2026, scheduled for October 13–15, 2026, at Moscone Center in San Francisco, California.
At Booth #668, Modutek will present its lineup of advanced semiconductor wet processing equipment, chemical delivery and distribution systems, precision cleaning gear, waste handling and abatement solutions, along with its evolving SmartFAB AI platform designed for intelligent SubFAB operations.
Modutek’s integrated strategy connects semiconductor process tools with the chemical, waste, and abatement infrastructure that underpin fab operations. By merging equipment engineering, facility infrastructure, and AI-driven operational intelligence, Modutek is creating solutions aimed at helping semiconductor manufacturers improve process control, equipment reliability, chemical usage, operational insight, and environmental outcomes.
Modutek CEO to Present on AI-Enabled Sustainability Intelligence
On Wednesday, October 14, from 10:40 a.m. to 10:50 a.m., Vineet Shrivastava, CEO of Modutek Corporation, will deliver a sustainability talk titled:
“From Measurement to Mitigation: AI-Enabled Sustainability Intelligence for Wet Process and Abatement”
Location: Moscone Center, South Hall, Lower Level, Room 1 – Sustainability Pavilion
Date: October 14, 2026
Time: 10:40 a.m.–10:50 a.m.
Speaker: Vineet Shrivastava, CEO, Modutek Corporation
The session will examine how semiconductor fabs can move past standard equipment monitoring and environmental compliance reporting by applying AI and predictive analytics to operational data from wet process, chemical delivery, waste management, and abatement systems.
The presentation will cover how existing metrics—such as chemical usage, flow, pH, ORP, conductivity, scrubber performance, and other equipment and facility data—can be transformed into actionable insights that support predictive maintenance, chemical optimization, emissions reduction, waste minimization, and stronger sustainability performance.
“Semiconductor fabs already generate significant amounts of valuable data across wet process, chemical delivery and abatement systems. The opportunity is to turn that data into intelligence fabs can act on,” said Vineet Shrivastava, CEO of Modutek Corporation. “At SEMICON West, we will discuss how AI-enabled monitoring and predictive tools can help fabs improve equipment reliability, optimize chemical utilization, reduce emissions and waste, and strengthen environmental performance while maintaining the process control required for advanced semiconductor manufacturing.”
Integrated Wet Process and Fab Infrastructure Solutions
At SEMICON West 2026, Modutek will showcase capabilities spanning the wet-process and SubFAB infrastructure lifecycle, including:
• Advanced Semiconductor Wet Process Equipment: Manual, semi-automated, and fully automated wet benches and process systems for wafer cleaning, etching, stripping, rinsing, drying, and other semiconductor wet processes.
• SmartFAB AI for Intelligent SubFAB Operations: Modutek’s AI-enabled platform features SmartCHEM™, SmartSCRUB™, SmartMAINT™, and SmartFLOW™, designed to convert operational and equipment data into intelligence for chemical management, scrubber performance, predictive maintenance, process flow, and sustainability optimization.
• Chemical Delivery and Distribution Systems: Engineered solutions for safely storing, delivering, monitoring, and distributing process chemicals across semiconductor manufacturing facilities.
• Chemical Waste Handling and Treatment Infrastructure: Integrated systems including chemical waste collection, lift stations, pH neutralization systems, and effluent treatment plants (ETPs) built to support safe and efficient management of semiconductor process waste streams.
• Air and Fume Abatement Solutions: Air/fume scrubber systems designed to meet semiconductor wet-process exhaust and abatement requirements while supplying operational data that can feed into broader facility monitoring and sustainability programs.
• Precision Parts Cleaning: Configurable semiconductor precision parts cleaning systems engineered for critical components and parts used in semiconductor manufacturing environments.
Connecting the Process Tool to the SubFAB
Modutek’s approach centers on linking traditionally separate layers of fab operations—from the wet process tool to chemical delivery, waste management, and abatement infrastructure, and ultimately to the data and intelligence layer.
This integrated method can provide fab owners, facility teams, engineering groups, and semiconductor manufacturers with better visibility into how process equipment and supporting infrastructure interact.
“Modutek has spent decades engineering wet process equipment around the demanding process, safety and environmental requirements of semiconductor manufacturing,” said Douglas Wagner, President of Modutek Corporation. “By combining that equipment expertise with chemical infrastructure, waste management, abatement and intelligent monitoring, we can provide customers with a more integrated approach, from the process tool into the SubFAB.”
Modutek representatives will be present throughout SEMICON West at Booth #668 to meet with semiconductor manufacturers, fab owners, process engineers, facilities teams, engineering and construction organizations, and technology partners for discussions on wet process equipment, fab infrastructure, automation, and AI-enabled SubFAB applications.
About Modutek Corporation
Founded in 1980 and based in San Jose, California, Modutek Corporation designs and manufactures semiconductor wet process equipment and supporting fab infrastructure for semiconductor manufacturing, advanced technology production, and research applications.
Modutek’s product range includes manual, semi-automated, and fully automated wet benches, single-wafer processing systems, precision parts cleaning equipment, chemical delivery and distribution systems, chemical waste collection and handling systems, lift stations, pH neutralization systems, effluent treatment solutions, air/fume scrubbers, and AI-enabled SubFAB intelligence technologies.
Through its SmartFAB AI platform—comprising SmartCHEM™, SmartSCRUB™, SmartMAINT™, and SmartFLOW™—Modutek is building an intelligent infrastructure layer aimed at helping semiconductor fabs turn operational data into actionable insights for equipment reliability, chemical management, predictive maintenance, sustainability, and facility performance.
For more details about Modutek Corporation and its semiconductor manufacturing solutions, visit Modutek.com.
SEMICON West 202
