Modutek to Showcase AI-Enabled SubFAB Intelligence and Wet Process Equipment at SEMICON West 2026

written by Samuel Reed · 18 hours ago
Modutek to Showcase AI-Enabled SubFAB Intelligence and Wet Process Equipment at SEMICON West 2026

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Modutek SmartFAB Architecture

Modutek Set to Present Wet Process Equipment, SmartFAB AI, Chemical Delivery, and Abatement Technologies at SEMICON West 2026, Booth #668

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Fabs already generate the data they need. The opportunity is to turn it into intelligence that improves reliability, chemical efficiency and environmental performance.”— Vineet Shrivastava, CEO, Modutek Corporation

SAN JOSE, CA, UNITED STATES, October 2, 2026 /EINPresswire.com/ — Modutek Corporation, a U.S.-based producer of semiconductor wet process tools and fab infrastructure systems, has confirmed its participation at SEMICON West 2026, scheduled for October 13–15, 2026, at Moscone Center in San Francisco, California.

Located at Booth #668, Modutek will feature its comprehensive range of advanced semiconductor wet processing equipment, chemical delivery and distribution systems, precision cleaning tools, waste handling and abatement solutions, along with its evolving SmartFAB AI platform for intelligent SubFAB operations.

Modutek’s holistic method links semiconductor process equipment with the chemical, waste, and abatement infrastructure that enables fab operations. Through the combination of equipment engineering, facility infrastructure, and AI-powered operational intelligence, Modutek is creating solutions aimed at assisting semiconductor manufacturers in enhancing process control, equipment dependability, chemical usage, operational transparency, and environmental outcomes.

Modutek CEO to Deliver Talk on AI-Driven Sustainability Intelligence
On Wednesday, October 14, from 10:40 a.m. to 10:50 a.m., Vineet Shrivastava, CEO of Modutek Corporation, will deliver a sustainability session titled:
“From Measurement to Mitigation: AI-Enabled Sustainability Intelligence for Wet Process and Abatement”
Location: Moscone Center, South Hall, Lower Level, Room 1 – Sustainability Pavilion
Date: October 14, 2026
Time: 10:40 a.m.–10:50 a.m.
Speaker: Vineet Shrivastava, CEO, Modutek Corporation
This presentation will examine how semiconductor fabs can move past conventional equipment monitoring and environmental compliance reporting by implementing AI and predictive analytics on operational data gathered from wet process, chemical delivery, waste management, and abatement systems.

The session will focus on how existing metrics—including chemical consumption, flow, pH, ORP, conductivity, scrubber performance, and other equipment and facility data—can be transformed into actionable insights supporting predictive maintenance, chemical optimization, emissions reduction, waste minimization, and stronger sustainability results.

“Semiconductor fabs already generate significant amounts of valuable data across wet process, chemical delivery and abatement systems. The opportunity is to turn that data into intelligence fabs can act on,” said Vineet Shrivastava, CEO of Modutek Corporation. “At SEMICON West, we will discuss how AI-enabled monitoring and predictive tools can help fabs improve equipment reliability, optimize chemical utilization, reduce emissions and waste, and strengthen environmental performance while maintaining the process control required for advanced semiconductor manufacturing.”

Comprehensive Wet Process and Fab Infrastructure Offerings

At SEMICON West 2026, Modutek will emphasize capabilities spanning the full wet-process and SubFAB infrastructure lifecycle, including:
• Advanced Semiconductor Wet Process Equipment: Manual, semi-automated, and fully automated wet benches and process systems supporting wafer cleaning, etching, stripping, rinsing, drying, and other semiconductor wet operations.

• SmartFAB AI for Intelligent SubFAB Operations: Modutek’s AI-enabled platform includes SmartCHEM™, SmartSCRUB™, SmartMAINT™, and SmartFLOW™, engineered to convert operational and equipment data into actionable intelligence for chemical management, scrubber performance, predictive maintenance, process flow, and sustainability optimization.

• Chemical Delivery and Distribution Systems: Custom-engineered solutions for the safe storage, delivery, monitoring, and distribution of process chemicals within semiconductor manufacturing facilities.

• Chemical Waste Handling and Treatment Infrastructure: Integrated offerings such as chemical waste collection systems, lift stations, pH neutralization systems, and effluent treatment plants (ETPs) built to support the safe and efficient management of semiconductor process waste streams.

• Air and Fume Abatement Solutions: Air/fume scrubber systems tailored to meet semiconductor wet-process exhaust and abatement requirements, while delivering operational data that can be integrated into broader facility monitoring and sustainability initiatives.

• Precision Parts Cleaning: Configurable semiconductor precision parts cleaning systems engineered for critical components and parts utilized in semiconductor manufacturing environments.

Bridging the Process Tool and the SubFAB
Modutek’s approach revolves around connecting historically distinct layers of fab operations—from the wet process tool to chemical delivery, waste management, and abatement infrastructure, and ultimately to the data and intelligence layer.

This integrated methodology can provide fab owners, facility teams, engineering groups, and semiconductor manufacturers with enhanced visibility into how process equipment and supporting infrastructure interact.

“Modutek has spent decades engineering wet process equipment around the demanding process, safety and environmental requirements of semiconductor manufacturing,” said Douglas Wagner, President of Modutek Corporation. “By combining that equipment expertise with chemical infrastructure, waste management, abatement and intelligent monitoring, we can provide customers with a more integrated approach, from the process tool into the SubFAB.”

Throughout SEMICON West, Modutek representatives will be present at Booth #668 to engage with semiconductor manufacturers, fab owners, process engineers, facilities teams, engineering and construction organizations, and technology partners regarding wet process equipment, fab infrastructure, automation, and AI-enabled SubFAB applications.

About Modutek Corporation

Established in 1980 and headquartered in San Jose, California, Modutek Corporation engineers and manufactures semiconductor wet process equipment and supporting fab infrastructure for semiconductor manufacturing, advanced technology production, and research applications.

Modutek’s product lineup includes manual, semi-automated, and fully automated wet benches, single-wafer processing systems, precision parts cleaning equipment, chemical delivery and distribution systems, chemical waste collection and handling systems, lift stations, pH neutralization systems, effluent treatment solutions, air/fume scrubbers, and AI-powered SubFAB intelligence technologies.

Through its SmartFAB AI platform—which includes SmartCHEM™, SmartSCRUB™, SmartMAINT™, and SmartFLOW™—Modutek is building an intelligent infrastructure layer designed to help semiconductor fabs turn operational data into actionable insights for equipment reliability, chemical management, predictive maintenance, sustainability, and facility performance.

For further details on Modutek Corporation and its semiconductor manufacturing solutions, visit Modutek.com.
SEMICON West 2026
Dates: October 13–15, 2026
Location: Moscone Center, San Francisco, California
Modutek Booth: #668

Sustainability Presentation:
“From Measurement to Mitigation: AI-Enabled Sustainability Intelligence for Wet Process and Abatement”
Speaker: Vineet Shrivastava, CEO, Modutek Corporation
Date: October 14, 2026
Time: 10:40 a.m.–10:50 a.m.
Location: Moscone Center, South Hall, Lower Level, Room 1 – Sustainability Pavilion

Vineet Shrivastava
Modutek Corporation
+1 866-803-1533
sales@modutek.com
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Samuel Reed

Samuel Reed

Samuel Reed is a senior journalist covering the intersection of business, technology, and society. With over a decade of experience, his work focuses on artificial intelligence, corporate governance, and emerging tech trends.

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